Tube Furnace with Silicon Carbide Tube

Model

TFM1500-5-SCT

Power

45KW

Dimensions

330×100×120cm

Tube Diameter

Silicon carbide tube, 200×2300mm

Power Supply Voltage

Three-phase 460V

Temperature Controller

Eurotherm 3504

Heating Element

Silicon carbide rods

Furnace Chamber Material

• The chamber is made of high-quality alumina polycrystalline fiber.
• The inner surface of the furnace chamber is coated with an imported high-temperature alumina coating (up to 1800°C), enhancing emissivity and ensuring a more uniform temperature field.

Valves and Flanges

• Left side: Water-cooled flange with inlet and outlet ports, along with two needle valves and one ball valve for gas intake and exhaust.
• Right side: KF25 vacuum extraction port, one needle valve, and one ball valve. This side also features a water-cooled flange.

Control Accuracy

+/- 1°C

Trigger

Phase-shift triggering

SCR (Silicon-Controlled Rectifier)

106/16E (Germany Semikron)

Maximum Temperature

1500°C

Rated Temperature

1400°C

Heating Rate

≤10°C/Min (modifiable upon request)

Recommended Heating Rate

≤5°C/Min

Thermocouple Type

S Type

Heating Zone Length

300+300+300+300+300mm

Outer Surface Temperature

≤45°C

Lid Protection System

When the furnace lid is opened, a relay automatically cuts off the main power supply to ensure user safety.

1. Single-stage pump

TW-1.5A

2. Two-stage pump

2XZ-2

3. VS-0.1 Vacuum System

Can achieve a vacuum level of 0.1Pa inside the tube furnace (comes with a resistance vacuum gauge for display).

4. VS High Vacuum System

A system consisting of molecular and mechanical pumps, capable of reaching a vacuum level of 10⁻³ Pa inside the tube furnace.

5. Constant Pressure Pump

Can control the internal tube pressure between -100.0KPa and 100.0KPa.

6. UK INFICON Capacitive Vacuum Gauge

Measurement range: 3.8x10⁻⁵ -1125 Torr. Can detect various gases, including mixed gases, with high accuracy and repeatability. Corrosion-resistant PCG554 version available.

7. Vacuum Cold Trap

Prevents contamination of the vacuum pump.

Tube Furnace with Silicon Carbide Tube