Ai 500 Watts 13.56MHz RF Generator for Up To 150mm Tube Furnaces
Reference: RF500
Manufacturer: Across International
Ai 500 Watts 13.56MHz RF Generator for Up To 150mm Tube Furnaces
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Ai RF500 series RF generators provide 500 watts of power and a 13.56MHz frequency, they can accommodate up to 150mm OD tubes and are ideal for PECVD (Plasma Enhanced Chemical Vapor Deposition) systems in application like plasma etching, plasma cleaning and plasma polymerization.
Output is adjustable from 5 to 500 watts, so one generator can run a gentle cleaning plasma or a stronger deposition process. Frequency stability of +/-0.005% keeps the plasma steady through long runs.
Automatic matching tunes the load as gas pressure and plasma conditions change, cutting reflected power without manual adjustment; the unit tolerates up to 200 watts reflected. Output is through a standard 50 Ω N-type female connector, cooling is by air so no separate water supply is needed, and it runs on 208-240 volts.
| Electrical requirements | 208-240 volts 50/60 Hz |
| Output power | 5 to 500 watts, adjustable in +/-1% step |
| RF frequency | 13.56 MHz with +/-0.005% stability |
| Reflection power | 200 watts max. |
| Matching | Automatic |
| RF output port | 50 Ω, N-type, female |
| Cooling | Air |
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